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2004 Meek Lecturer: Dr. Elsa Reichmanis
Bell Labs Fellow and Director of the
Materials Research Department at Bell Laboratories, Lucent Technologies
Elsa Reichmanis is Bell Labs Fellow and Director of the Materials Research
Department at Bell Laboratories, Lucent Technologies. She received her
Ph. D. (1975) and BS (1972) degrees in chemistry from Syracuse University,
and joined Bell Labs in 1978 after completing a post-doctoral Fellowship
program. In 1984, she was promoted to Supervisor of the Radiation
Sensitive Materials and Application Group, followed by promotion to
Head of the Polymer and Organic Materials Research Department in 1994.
Her research interests include the chemistry, properties and application
of materials technologies for photonic and electronic applications,
with particular focus on polymeric and nanostructured materials for
advanced communications technologies.
She has had impact on the field of microlithography, which is central
to the manufacture of electronic devices and a cornerstone for the whole
microelectronics industry. The active element in microlithography is the
photoresist, a polymer that must be sensitive to the imaging radiation,
create images as small as 100 nm and protect the underlying semiconductor
device during chemical processing. Her work has contributed to the
development of a molecular level understanding of how chemical structure
affects materials function leading to new families of lithographic
materials and processes that may enable advanced VLSI manufacturing.
Notably, she was responsible for the design of new imaging chemistries
for 193 nm lithography that were the first, readily accessible and
manufacturable materials for this technology. In a related area she was
involved in the design and characterization of "closed-pore" nanoporous
low-dielectric constant (k > 1.4) materials exhibiting a high degree
of mechanical and environmental stability. She is currently exploring
imaging and hybrid organic/inorganic materials chemistries for photonic
applications.
She has been active in the American Chemical Society throughout her
career. She is Past-Chair of the PMSE Division and has served as a
member of the Executive Committee of Division since 1986. In addition,
she is a member of the ACS Committees on Science and Publications,
and is a member of the Chemical and Engineering News Editorial Board.
In other technical activities, she served as a member of the Japanese
Technology Evaluation Program Panel on Advanced Materials sponsored by
the National Science Foundation and on the Committee to Survey Materials
Research Opportunities and Needs for the Electronics Industry sponsored
by the National Research Council. From 1993 to 1998, she was a member of
the National Materials Advisory Board and the US National Committee for
IUPAC, and is a current member of the Air Force Science Advisory Board.
She was presented with the 1993 Society of Women Engineers Achievement
Award and in 1995, was elected to the National Academy of Engineering.
In the same year she was named Bell Laboratories Fellow. She is the
1996 recipient of the ASM Engineering Materials Achievement Award, she
was elected a Fellow of the American Association for the Advancement
of Science in 1998, and was awarded the ACS Award in Applied Polymer
Science in 1999. In 2001, she was awarded the Society of Chemical
Industry's Perkin Medal and was the recipient of the Arents Medal from
Syracuse University. She is also a member of the American Physical
Society, the Materials Research Society, the Institute of Electrical
and Electronics Engineers, the Society of Photo-optical Engineers;
and is associate editor of the ACS Journal, Chemistry of Materials.
Most recently she served as 2003 President of the ACS.
See
photos from the 2004 Meek Lecture
Dr. Reichmanis will present the following lectures:
- Thursday, May 6
Materials Chemistry and Advanced Technology:
Collaborative Endeavor
- and, The Meek Lecture, Friday, May 7
Chemical Design Challenges in Polymeric Materials
for Electronic Applications
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